发明名称 単結晶体の結晶方位を再配向する方法
摘要 <p>A method of changing the crystallographic orientation of a single crystal body is disclosed that includes the steps of characterizing a crystallographic orientation of the single crystal body and calculating a misorientation angle between a select crystallographic direction of the single crystal body and a projection of the crystallographic direction along a plane of a first exterior major surface of the single crystal body. The method further includes removing material from at least a portion of the first exterior major surface to change the misorientation angle.</p>
申请公布号 JP5755706(B2) 申请公布日期 2015.07.29
申请号 JP20130235337 申请日期 2013.11.13
申请人 发明人
分类号 C30B33/00;H01L21/304 主分类号 C30B33/00
代理机构 代理人
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