发明名称 |
AIRFLOW MEASURING APPARATUS |
摘要 |
Provided is an airflow measuring apparatus with good measurement accuracy. An airflow measuring apparatus includes: a sub-passage that takes in a part of a flow of fluid flowing through an intake pipe; a sensor element that is disposed in the sub-passage to measure the flow of fluid; a circuit part that converts the flow of fluid detected by the sensor element into an electric signal; a connector part having a connector that is electrically connected to the circuit part to output a signal externally; and a casing that supports the sensor element and the circuit part, the sensor element being disposed in the intake pipe. The sensor element includes a cavity that is disposed at a semiconductor substrate, and a diaphragm including a thin film part that covers the cavity. The sensor element is mounted at a lead frame. The sensor element and the lead frame have surfaces that are mold-packaged with resin so that a diaphragm part of the sensor element and a part of the lead frame are exposed. At least one hole is disposed at the lead frame for communication between the cavity and exterior of the mold package. |
申请公布号 |
EP2789994(A4) |
申请公布日期 |
2015.07.29 |
申请号 |
EP20110876912 |
申请日期 |
2011.12.07 |
申请人 |
HITACHI AUTOMOTIVE SYSTEMS, LTD. |
发明人 |
MORINO, TAKESHI;TASHIRO, SHINOBU;TOKUYASU, NOBORU;DOI, RYOSUKE;HANZAWA, KEIJI |
分类号 |
G01F1/692;F02D41/18;G01F1/684;G01F5/00;H01L35/34 |
主分类号 |
G01F1/692 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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