| 摘要 |
<p>A gas-tight seal chamber and an exam chamber are arranged in a manufacturing device for piezoelectric vibration components. The gas-tight seal chamber is vacuum interior space formed by heating and jointing a plurality of sealing members under vacuum. The electronic components are sealed in a gas-tight manner in the interior space. The gas-tight state of the interior space of the piezoelectric vibration components is examined in the exam chamber. The piezoelectric vibration components are transported in the sequence of the gas-tight seal chamber and the exam chamber.</p> |
