| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid injection head which is improved in durability by suppressing breakage of a piezoelectric layer, a liquid injection device, and a piezoelectric actuator. <P>SOLUTION: The liquid injection head includes a pressure generation chamber 12 which communicates with a nozzle opening 21 for emitting a jet of liquid, and a piezoelectric actuator 300 which includes a first electrode 60, a piezoelectric layer 70 provided on the first electrode 60, and a second electrode 80 provided on the piezoelectric layer 70, and makes change in pressure in the pressure generation chamber 12, the piezoelectric layer 70 having a perovskite structure preferentially oriented to a (100) plane. A peak position (2θ) of a diffraction peak of X rays originating from the (100) plane of the piezoelectric layer 70 on the side of the second electrode 80 is made smaller than a peak position (2θ) of diffraction of X rays originating from the (100) plane of the piezoelectric layer 70 on the side of the first electrode 60. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
