Structuring three-dimensional components with non-diffusing noble or special metals and their alloys, with use being made of sputter technology

摘要

One aspect is a method for the production of a three-dimensional structure of successive layers producing a multitude of successive layers wherein, with the exception of a first layer, each of the successive layers is arranged on a preceding layer. Each of the successive layers includes at least two materials wherein one material is a sacrificial material and one material is a structure material. Each of the successive layers defines a successive cross-section through the three-dimensional structure. Producing each of the layers includes depositing the sacrificial material by means of an electrochemical process and depositing the structure material by means of physical gas phase deposition. After a multitude of successive layers has been produced, the three-dimensional structure is uncovered by removing at least a part of the sacrificial material. The sacrificial material is at least one of a group consisting of nickel, silver, palladium, and gold.

主权项

1. A method for the production of a three-dimensional structure of successive layers, comprising:
(A) producing a multitude of successive layers wherein, with the exception of a first layer, each of the successive layers is arranged on a preceding layer, wherein
each of the successive layers comprises at least two materials wherein one material is a sacrificial material and one material is a structure material,each of the successive layers defines a successive cross-section through the three-dimensional structure, producing each of the layers comprises the following steps: I. depositing the sacrificial material by means of an electrochemical process, II. depositing the structure material by means of physical gas phase deposition, wherein the structure material is a metal, (B) after a multitude of successive layers has been produced, uncovering the three-dimensional structure by removing at least a part of the sacrificial material, characterized in that the sacrificial material is at least one of the group consisting of nickel, silver, palladium, and gold, and that the sacrificial material is selected such that it does not diffuse into the structure material when the structure material is deposited by the physical gas phase deposition.