| 发明名称 | Bond heads for thermocompression bonders, thermocompression bonders, and methods of operating the same | ||
| 摘要 | A bond head for a thermocompression bonder is provided. The bond head includes a tool configured to hold a workpiece to be bonded, a heater configured to heat the workpiece to be bonded, and a chamber proximate the heater. The chamber is configured to receive a cooling fluid for cooling the heater. | ||
| 申请公布号 | US9093549(B2) | 申请公布日期 | 2015.07.28 |
| 申请号 | US201414314149 | 申请日期 | 2014.06.25 |
| 申请人 | Kulicke and Soffa Industries, Inc. | 发明人 | Wasserman Matthew B.;Schmidt-Lange Michael P. |
| 分类号 | B23K37/00;H01L23/00;B23K3/08;B23K1/00;B23K1/008;B23K3/02 | 主分类号 | B23K37/00 |
| 代理机构 | Stradley Ronon Stevens & Young, LLP | 代理人 | Stradley Ronon Stevens & Young, LLP |
| 主权项 | 1. A bond head for a thermocompression bonder, the bond head comprising: a tool configured to hold a workpiece to be bonded; a heater configured to heat the workpiece to be bonded; and a chamber proximate the heater, the chamber configured to receive a cooling fluid for cooling the heater, the chamber being positioned on a side of the heater, the tool being positioned on an opposite side of the heater, wherein the chamber is in contact with the heater with a variable contact force so as to adjust a heat exchange between the heater and the chamber. | ||
| 地址 | Fort Washington PA US | ||