| 发明名称 | Gun configured to generate charged particles | ||
| 摘要 | A gun configured to generate charged particles, comprising a ring-cathode (200) electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode (1406) arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. A related method is also disclosed. | ||
| 申请公布号 | US9093243(B2) | 申请公布日期 | 2015.07.28 |
| 申请号 | US201414284128 | 申请日期 | 2014.05.21 |
| 申请人 | NATIONAL UNIVERSITY OF SINGAPORE | 发明人 | Khursheed Anjam |
| 分类号 | H01J37/26;H01J3/18;H01J3/20;H01J3/02 | 主分类号 | H01J37/26 |
| 代理机构 | Innovation Capital Law Group, LLP | 代理人 | Chu Joseph G.;Lin Vie Y.;Innovation Capital Law Group, LLP |
| 主权项 | 1. A gun configured to generate charged particles, comprising: a ring-cathode electrically configured to generate a charged particle beam; a lens arranged to focus the charged particle beam on a specimen; and at least one correction focusing electrode arranged to generate at least one electrostatic/magnetic field to further divergently/convergently focus the charged particle beam for correcting in-plane geometric aberrations associated with the lens, the focusing being based on the in-plane geometric aberrations associated with the lens. | ||
| 地址 | Singapore SG | ||