Method for controlling a scanning microscope

摘要

The invention relates to a control method having at least two control loops for a scanning microscope provided with a microlever and an actuator suitable for energizing the microlever, in which a first loop maintains as a controlled variable the oscillation amplitude of the microlever and as a manipulated variable the amplitude of the electric signal supplied to the actuator, and a second loop uses as a controlled variable the amplitude of the aforementioned electric signal and as a manipulated variable the tip-sample distance. Said procedure makes it possible to ignore changes of sign in the tip-sample interaction.

主权项

1. A method of control consisting of two control loops for a scanning microscope provided with a micro-cantilever and an actuator adapted to excite the micro-cantilever, wherein the two control loops include a first loop having an oscillation amplitude of the micro-cantilever as a controlled variable and an amplitude of an electrical signal introduced into the actuator as a manipulated variable, and a second loop that uses the amplitude of the previous electrical signal as the controlled variable and a tip-sample distance as the manipulated variable.