Method of manufacturing liquid droplet ejection head

摘要

An object of the invention is to provide a method of manufacturing a liquid droplet ejection head that is capable of realizing cost reduction by a simple process and obtaining ejection reliability over a long period of time. The method includes: forming a water repellent film on a nozzle forming substrate having a nozzle hole and inside the nozzle hole; adhering a protective film on the water repellent film that is formed on the surface of the nozzle forming substrate; removing the water repellent film formed inside the nozzle by a plasma treatment; and peeling the protective film, wherein polysiloxane is not contained in an adhesion component and a base material of the protective film.

主权项

1. A method of manufacturing a liquid droplet ejection head, the method comprising:
forming a water repellent film on a surface of a nozzle forming substrate having a nozzle hole and on a side wall of the nozzle hole; adhering a protective film on a surface of the water repellent film that is formed on the surface of the nozzle forming substrate, wherein the protective film has a release film on at least one surface thereof, the release film containing polysiloxane; peeling the release film from the protective film before the adhering of the protective film; removing the water repellent film formed on the side wall of the nozzle hole by a plasma treatment; and peeling the protective film, wherein polysiloxane is not contained in an adhesion component and a base material of the protective film.