Microelectromechanical systems comprising differential inductors and methods for making the same

摘要

An integrated Microelectromechanical Systems (“MEMS”) device (100). The MEMS device comprises a substrate (200, 300), a transition portion (118), and a differential inductor (1000, 1100, 1300). The transition portion is connected to and at least partially extends transversely away from a major surface of the substrate. The differential inductor is mechanically suspended above a major surface of the substrate at least partially by the transition portion. The differential inductor is also electrically connected to an electronic circuit external thereto by the transition portion. A first dielectric gap exists between the major surface of the substrate and the differential inductor.

主权项

1. An integrated Microelectromechanical Systems (“MEMS”) device, comprising:
a substrate; a transition portion connected to and at least partially extending transversely away from a major surface of the substrate; a differential inductor mechanically suspended above a major surface of the substrate at least partially by the transition portion and electrically connected to an electronic circuit external thereto by the transition portion; and a first dielectric gap between the major surface of the substrate and the differential inductor.