AC-driven electrostatic chuck

摘要

According to an aspect of an embodiment of the invention, there is provided an AC-driven electrostatic chuck including: a dielectric substrate including protrusions formed on a major surface on a side of mounting a clamped object, and a bottom surface part formed around the protrusions; and an electrode provided on the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other, the plurality of electrode elements being enabled to be applied with an AC voltage of mutually different phases, respectively, and the protrusions being arranged on the major surface with a prescribed spacing depending on shape of the plurality of electrode elements. The AC-driven electrostatic chuck is capable of suppressing local damage to part of the protrusions provided on the mounting surface side.

主权项

1. An AC-driven electrostatic chuck comprising:
a dielectric substrate having a major surface which is configured to support thereon an object which is to be electrostatically clamped by the chuck, the major surface having a bottom part and a plurality of protrusions which extend upwardly from the bottom part; and an electrode provided in the dielectric substrate, the electrode including a plurality of electrode elements spaced from each other with gaps therebetween, the plurality of electrode elements being configured to be applied with an AC voltage of mutually different phases, respectively, and the plurality of protrusions being arranged on the major surface with a prescribed spacing therebetween based on each shape of the plurality of electrode elements such that the protrusions are at positions only on a projection image of the electrode elements obtained by projecting each shape of the plurality of electrode elements on the major surface.