| 发明名称 | Scanning transmission electron microscope system, image processing method, and image processing apparatus | ||
| 摘要 | A scanning transmission electron microscope system includes: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum. | ||
| 申请公布号 | US9093250(B2) | 申请公布日期 | 2015.07.28 |
| 申请号 | US201414483522 | 申请日期 | 2014.09.11 |
| 申请人 | FUJITSU LIMITED | 发明人 | Yamazaki Takashi;Kotaka Yasutoshi |
| 分类号 | H01J37/28;H01J37/244;G01N23/04;G01N13/12;H01J37/22 | 主分类号 | H01J37/28 |
| 代理机构 | Kratz, Quintos & Hanson, LLP | 代理人 | Kratz, Quintos & Hanson, LLP |
| 主权项 | 1. A scanning transmission electron microscope system comprising: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum. | ||
| 地址 | Kawasaki JP | ||