Micro-electro-mechanical-system (MEMS) driver

摘要

In an example, a driver for a micro-electro-mechanical-system (MEMS) device can include a first input configured to receive a first command signal including an oscillatory command signal, a second input configured to receive a second command signal including a bias command signal, and an amplifier configured to receive a high voltage supply, to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state.

主权项

1. A driver for a micro-electro-mechanical-system (MEMS) device, the driver comprising:
a first input configured to receive a first command signal including an oscillatory command signal; a second input configured to receive a second command signal including a bias command signal; an amplifier configured to receive a high voltage supply, the amplifier configured to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state; a first gain block electrically connected to the first input; and a second gain block electrically connected to the second input, wherein gain provided to the first command signal by the first gain block is independent of gain provided to the second command signal by the second gain block.