Method for fabricating semiconductor device

摘要

A method for fabricating a semiconductor device is disclosed in the present invention. The abovementioned method comprises the following steps. Firstly, a gate is formed on a substrate. A gate insulating layer is then formed on the gate, and further an active layer is disposed on the gate insulating layer, wherein the active layer is composed of a microwave absorbing material. Source/drain is defined on the active layer to form the semiconductor device, and a microwave annealing process is finally performed thereon.

主权项

1. A method for fabricating semiconductor device by a microwave annealing process, for increasing the efficiency of semiconductor device, wherein a treatment time of the microwave annealing process is by selected from the group consisting of 100 seconds, 300 seconds, and 600 seconds, comprising:
depositing a 100 nm molybdenum (Mo) to form a gate on a washed glass substrate by a DV sputter; depositing a 150 nm silicon nitride on the gate to form a gate insulating layer on the gate by the plasma enhanced chemical vapor deposition (PECVD) conducted at 400° C.; depositing a 50 nm amorphous indium gallium zinc oxide (a-IGZO) on the gate insulating layer to form an active layer on the gate insulating layer by the DV sputter, wherein the composition of indium gallium zinc oxide is 1:1:1:4 (In:Ga:Zn:O); depositing a 100 nm indium tin oxide (ITO) on the active layer by a RF sputter and etched by photomask process to define a source/drain on the active layer to form the semiconductor device; and performing a microwave annealing process, wherein, a microwave power generated in the microwave annealing process is less than 1500 W, a microwave frequency generated in the microwave annealing process is between 2 GHz and 18 GHz, a treatment time of the microwave annealing process is selected from the group consisting of 100 seconds, 300 seconds, and 600 seconds.