| 摘要 |
<p>Disclosed is a method to inspect and repair a substrate and a system for the same which inspects and repairs an error on a circuit of a substrate using an electrical method after forming an element and a conductive line on the substrate before installing an organic thin film on the substrate in order to manufacture an active matrix organic light emitting diode (AMOLED) display. The method of inspecting and repairing a substrate comprises: an entire substrate inspecting step of inspecting whether an error exists in the entire substrate by transmitting and receiving an electrical signal to/from the substrate, and figuring out a location information in regards to an erroneous portion of the substrate in an entire inspecting apparatus having a plurality of probes for electrical connection to a substrate terminal; a substrate transferring step of transmitting the location information regarding the substrate with the error and the erroneous portion of the substrate to a repair-part inspecting apparatus with a repair unit, and an inspecting unit having a relatively small number of probes in comparison to the entire inspecting apparatus; a substrate repair step of repairing, by a repair-part inspecting apparatus, the substrate by utilizing the repair unit based on the location information; and a substrate part inspecting step of checking whether the erroneous part is repaired in such a manner that the inspecting unit moves based on the location information, and transmits/receives an electrical signal to/from the erroneous portion. According to the present invention, the entire substrate inspecting apparatus has a relatively large number of probes such that the entire substrate inspecting apparatus rapidly performs an inspection of the entire substrate. The repair-substrate part inspecting apparatus repairs the corresponding portion and performs a partial inspection for repair checking; thus performing an effective repair and a re-inspection.</p> |
