发明名称 PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT USING THE SAME, METHOD FOR FORMING RESIST PATTERN, AND METHOD FOR MANUFACTURING TOUCH PANEL
摘要 PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition that can be formed into a photosensitive layer having excellent adhesiveness to a substrate having various conductors, and having excellent developability of an exposed part and developer resistance in an unexposed part, even when development by using an alkaline aqueous solution is repeated, and to provide a photosensitive element using the above composition.SOLUTION: The positive photosensitive resin composition comprises the following components of: (A) a modified phenolic resin having an unsaturated hydrocarbon group; (B) a meta-para cresol resin; (C) an ortho-cresol resin; (D) a compound that generates an acid by light; and (E) a silane compound having a polybasic acid skeleton or a polybasic acid anhydride skeleton. The content of the (E) component is less than 10 parts by mass with respect to total 100 parts by the mass of the (A), (B), (C) and (D) components.
申请公布号 JP2015135481(A) 申请公布日期 2015.07.27
申请号 JP20140253153 申请日期 2014.12.15
申请人 HITACHI CHEMICAL CO LTD 发明人 UEDA TOMOKO;SAWABE MASARU;TAMADA HARUHISA
分类号 G03F7/023;G03F7/004;G03F7/075;H05K3/06 主分类号 G03F7/023
代理机构 代理人
主权项
地址