| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a turbo molecular pump in which a rotor does not come into contact with stators.SOLUTION: In a turbo molecular pump 100, rotor blades 20 consisting of blade parts 18 and annular parts 19 are protruded from a side surface of a rotor 4. Annular grooves 22 for avoiding contact with stators 44 are provided in upper surfaces 191 of the annular parts 19.</p> |
