| 摘要 |
PROBLEM TO BE SOLVED: To provide a holding device which is advantageous for stabilizing the temperature of a plate.SOLUTION: A holding device 100 for holding a plate 201, includes: a supporting member 102 for supporting the plate 201; a platy member 103 disposed oppositely to the plate supported by the supporting member 102; and an injection port 105 for injecting a fluid. The holding device 100 has a supply mechanism 104 which supplies the fluid into a space between the plate 201 and the platy member 103 through the injection port 105. The thickness of the platy member is thinner than the thickness of the plate. The injection port is disposed at a position separated from the plate and the platy member in a parallel direction with a surface of the plate. The injection port is disposed so as to make the amount per unit area of the fluid injected from the injection port and hits on a side surface of the plate smaller than the amount per unit are of the fluid injected from the injection port and hits on a side surface of the platy member. |
