| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide: improved protective liners for vacuum chambers and other applications; and techniques of manufacturing and replacing such liners.SOLUTION: A graphite article comprises: graphite 102; and a conductive coating 104 overlaying at least a portion of the graphite 102. The conductive coating 104 comprises a through-thickness resistance R of less than about 50 ohms as measured through the thickness of the graphite 102 and the conductive coating 104. A method for manufacturing a graphite article comprising a conductive coating comprises the steps of: treating graphite of the article with a reactive ion etch process; and after treating the graphite 102 with the reactive ion etch process, applying the conductive coating 104 over at least a portion of the graphite 102. A method for refurbishing a graphite article comprising graphite and an overlaying conductive coating comprises the steps of: removing the overlaying conductive coating 104 of the graphite article with a reactive ion etch process; and applying a new conductive coating 104 over at least a portion of the graphite.</p> |
