| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a microwave processing apparatus capable of finely adjusting distribution of a microwave in a processing container.SOLUTION: Wedge-shaped members 51A and 52A have a small dielectric constant, and wedge-shaped members 51B and 52B have a dielectric constant relatively larger than that of the wedge-shaped members 51A and 52A. The two wedge-shaped members different in dielectric constant are stuck together, allowing a dielectric constant in a direction perpendicular to a traveling direction of a microwave transmitted through a wave guide to be non-uniform in each of wedge-shaped members 51 and 52. The wedge-shaped members 51 and 52 are relatively rotated, allowing magnitude of a deflection angle of a microwave transmitting a rotation transmission window 33B to be changed.</p> |
