| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for manufacturing a transparent conductive laminate for a touch panel having excellent reliability, which provides excellent adhesiveness between a film substrate and a copper film, and which enables formation of a thin line copper pattern.SOLUTION: The method for manufacturing a transparent conductive laminate for a touch panel comprises: successively forming thin films of copper oxide and copper on at least one surface of a transparent film substrate; and forming conductive patterns with a line width of 1 to 10μm in the copper oxide film and the copper film. The thin film of copper oxide is formed by sputtering in an atmosphere of 50°C or higher, in which a mixture gas of argon gas and oxygen gas is used, where an amount of the oxygen gas introduced is 15 vol.% to 30 vol.% with respect to the mixture gas.</p> |
