| 摘要 |
<p>The present invention relates to a pressure control system of a pick-up apparatus for testing a device and an apparatus for testing a device. According to an embodiment of the present invention, the pressure control system of a pick-up apparatus for testing a device comprises: a pressing unit to press a device gripping unit to pick up a component device along with first air pressure; a first regulator to control the first air pressure supplied to the pressing unit; a first electronic value installed in a flow passage at a rear end of the first regulator, which forms a first flow passage between the valve and the first regulator; a pressure sensor to sense pressure given by the device gripping unit along with the pressing of the pressing unit or the first air pressure supplied to the pressing unit; a minute-flux control valve installed on a second flow path between the first electronic value and the pressing unit to softly control the flux of air supplied from the first electronic value so as to softly provide the first air pressure to the pressing unit along with a flux control signal according to a pressure sensed by the pressure sensor. Further, a pick-up apparatus for testing a device is proposed.</p> |
