DEPOSITION OF IRREGULAR SHAPE LAYER FOR FLEXIBLE SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a stacking method of a multiple layer (or "multi-layer") of an irregular shape material over a substrate to be encapsulated.SOLUTION: A method for depositing a plurality of irregular shape layers on a substrate, comprises: (a) the step of depositing an inorganic layer containing metal atoms adsorbed by said substrate, over said substrate; (b) the step of depositing a first hydrocarbon containing layer over said inorganic layer by adsorbing said hydrocarbon containing source precursor; and (c) the step of forming a plurality of layers of an inorganic layer and the first hydrocarbon containing layer over said substrate by repeating the steps (a) and (b).