发明名称 CUTTING METHOD OF WORKPIECE
摘要 <p>PROBLEM TO BE SOLVED: To provide a cutting method of a workpiece capable of reducing undulation, by reducing arithmetic average roughness Ra of the workpiece after cutting, without causing abrasion of a resin coating film and disconnection of a saw wire in the middle of cutting, when cutting the workpiece except for silicon carbide, by using the saw wire made by coating a surface of a steel wire with the resin coating film.SOLUTION: The method is provided for cutting the workpiece except for the silicon carbide by using the saw wire made by coating the surface of the steel wire with the resin coating film. The cutting method of the workpiece comprises a process of cutting the workpiece by making the saw wire travel, in which, among normals of the saw wire, a swing width in the direction of the normal passing through the central axis of the workpiece is set to 7 degrees or less (without including 0 degree) at a maximum.</p>
申请公布号 JP2015131353(A) 申请公布日期 2015.07.23
申请号 JP20140002739 申请日期 2014.01.09
申请人 KOBELCO KAKEN:KK 发明人 YOSHIKAWA KAZUO;MATSUSHIMA YOSHITAKE;URAZUKA AKINORI
分类号 B24B27/06;B28D1/22;B28D5/04;H01L21/304 主分类号 B24B27/06
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