| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a drainage treatment device and a drainage treatment method, capable of efficiently treating an SPM drainage through accurate temperature control of the drainage.SOLUTION: In a reservoir mode (a first mode) in which the drainage from each of treatment units 11 of a substrate treatment apparatus 2 is discharged to a first tank 21 or a second tank 22, the temperature of drainage in the first tank 21 or a second tank 22 is controlled at 125 degrees Celsius. At the time when a decomposition mode (a second mode) in which the drainage from each of treatment units 11 is not discharged to a first tank 21 or a second tank 22 is reached, the temperature of drainage in the first tank 21 or a second tank 22 is controlled at 150 degrees Celsius.</p> |
