OXIDE SINTERED BODY AND TABLET OBTAINED BY PROCESSING SAME

摘要

A tablet for ion plating which allows high speed formation of transparent conductive films suitable for solar cells and allows continuous film formation without causing cracks, breakage or splashing. A sintered oxide includes indium oxide as a main component and tin as an additive element, and having a tin content of 0.001 to 0.15 in terms of an atomic ratio of Sn/(In+Sn). The sintered oxide mainly includes crystal grains (A) having a tin content that is less than an average tin content of the sintered oxide and crystal grains (B) having a tin content that is at or above the average tin content of the sintered oxide, the difference in the average tin content between the crystal grains (B) and the crystal grains (A) being 0.015 or more in terms of the atomic ratio of Sn/(In+Sn), and has a density of 3.4 to 5.5 g/cm3.

主权项

1. A sintered oxide comprising indium oxide as a main component and tin as an additive element, and having a tin content of 0.001 to 0.15 in terms of an atomic ratio of Sn/(In+Sn), wherein:
the sintered oxide mainly comprises crystal grains (A) having a tin content that is less than an average tin content of the sintered oxide and crystal grains (B) having a tin content that is at or above the average tin content of the sintered oxide, a difference in the average tin content between the crystal grains (B) and the crystal grains (A) being 0.015 or more in terms of the atomic ratio of Sn/(In+Sn), and has a density of 3.4 to 5.5 g/cm3.