THERMALLY BALANCED DIFFERENTIAL ACCELEROMETER

摘要

A single sensing unit having two electrodes with a common thermal reference is positioned near the centroid of the inertial mass of a differential inductive accelerometer. As the mass is displaced a first sensor detects an increase in inductance while a second sensor detects a decrease in inductance. Significantly, the first and second sensors share a common thermal reference eliminating any thermal differential. As the sensor system is closely aligned with the centroid of the inertial mass the sensor system of the present invention reduces or eliminates any systemic error.

主权项

1. An accelerometer, comprising:
a housing configured to have a sensitivity axis; an inertial mass having a first center of mass on the sensitivity axis; a deformable support structure connecting the inertial mass to the housing and configured to provide the inertial mass mobility along the sensitivity axis; a sensor, apart from the inertial mass, having a second center of mass on the sensitivity axis and connected to the housing wherein the sensor is configured to detect a change in position of the inertial mass along the sensitivity axis.