ANGLE CALIBRATION FOR GRAZING-INCIDENCE X-RAY FLUORESCENCE (GIXRF)

摘要

A method includes directing an X-ray beam to be incident at a grazing angle on a location on a surface of the sample. An X-ray fluorescence excited at the location is measured. A reflection angle of the X-ray beam from the surface and a transmission angle of the X-ray beam are measured. An angle of incidence of the X-ray beam on the surface is evaluated using the measured reflection and transmission angles, and the measured X-ray fluorescence is analyzed using the evaluated angle of incidence.

主权项

1. A method for analysis of a sample, comprising:
directing an X-ray beam to be incident at a grazing angle on a location on a surface of the sample; measuring X-ray fluorescence excited at the location; measuring a reflection angle of the X-ray beam from the surface and a transmission angle of the X-ray beam; evaluating an angle of incidence of the X-ray beam on the surface using the measured reflection and transmission angles; and analyzing the measured X-ray fluorescence using the evaluated angle of incidence.