| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a surface emitting laser element oscillated by an intended mode number.SOLUTION: A vertical cavity surface emitting laser element comprises: a semiconductor lamination part which includes a substrate, a first mirror laminated on the substrate, an active layer laminated on the first mirror, a current blocking layer including a disc-shaped current injection part laminated on a part of the active layer and a current blocking part formed on an outer periphery of the current injection part, and a current path layer laminated on the current blocking layer; an electrode formed on the semiconductor lamination part and has a circular opening; and a second mirror laminated on the opening. The first mirror and the second mirror form an optical resonator. A difference between an inside diameter of the current blocking part and an opening diameter of the opening of the electrode, and a distance between the current blocking layer and the electrode in a resonance direction of the optical resonator are set in a manner such that the surface emitting laser element outputs laser beams by an intended mode number.</p> |
