| 发明名称 |
MEMS Component And Method For The Production Thereof |
| 摘要 |
The invention proposes a MEMS component having a crystalline base body (GK), a recess (AN) and a structured assembly (A) which closes said recess, in which an opening (OG) is structured in a first functional layer (MN), the effective opening cross section thereof varying as a function of the pressure difference on the two sides of the first functional layer (MN). |
| 申请公布号 |
US2015207435(A1) |
申请公布日期 |
2015.07.23 |
| 申请号 |
US201314420871 |
申请日期 |
2013.08.01 |
| 申请人 |
EPCOS AG |
发明人 |
Rombach Pirmin Hermann Otto |
| 分类号 |
H02N1/08 |
主分类号 |
H02N1/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS component
having a crystalline base body, which has a recess having a structured assembly on the base body, which comprises at least a first functional layer or a plurality of functional layers and covers the recess, in which an opening, the effective opening cross section of which varies as a function of the pressure difference on the two sides of the first functional layer, is structured in the first functional layer of the assembly in the region above the recess. |
| 地址 |
München DE |
