| 发明名称 |
METHOD FOR MANUFACTURING A MULTILAYER STRUCTURE ON A SUBSTRATE |
| 摘要 |
The invention relates to a method for manufacturing a multilayer structure on a first substrate made of a first material having a Young's modulus Ev, the method including: using a second substrate having a planar surface covered by the multilayer structure, the second substrate being made of a second material having a Young's modulus Es that is different from the Young's modulus Ev, and a thickness es, the mean Young's modulus Es over thickness es, measured in any direction in a plane parallel to said surface, being constant, plus or minus 10%; bonding the first substrate to the multilayer structure; and removing the second substrate. |
| 申请公布号 |
US2015206938(A1) |
申请公布日期 |
2015.07.23 |
| 申请号 |
US201214369698 |
申请日期 |
2012.12.29 |
| 申请人 |
Commissariat à I'énergie atomique et aux energies alternatives |
发明人 |
Rossini Umberto;Templier François |
| 分类号 |
H01L29/16;B32B17/06;H01L21/762;H01L29/04;H01L23/00 |
主分类号 |
H01L29/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a multilayer structure on a first support made of a first material having a Young's modulus Ev, the method comprising the successive steps of:
providing a second support having a planar surface covered with the multilayer structure, the second support being made of a second material having a Young's modulus Es, different from Young's modulus Ev, and a thickness es, the average of Young's modulus Es across thickness es, measured along any direction in a plane parallel to said surface, being constant to within 10%; bonding the first support to the multilayer structure; and removing the second support. |
| 地址 |
Paris FR |
