| 发明名称 |
COIL ASSEMBLY, ELECTROMAGNETIC ACTUATOR, STAGE POSITIONING DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD. |
| 摘要 |
A coil assembly for an electromagnetic actuator or motor, includes a magnetic core including at least one pair of slots; a coil, at least partly mounted inside the at least one pair of slots; and a cooling member, the cooling member being mounted to a surface of the coil. |
| 申请公布号 |
NL2014016(A) |
申请公布日期 |
2015.07.23 |
| 申请号 |
NL20142014016 |
申请日期 |
2014.12.19 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
HUANG YANG-SHAN;KIM MINKYU;NIJSSE GERARD JOHANNES PIETER |
| 分类号 |
G03F7/20;H01L21/68 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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