ANALYTICAL APPARATUS FOR GAS FORM ADSORBED SPECIES

摘要

The analysis apparatus for adsorbed species in a gas phase according to an embodiment of the present invention includes a reactor wherein the inside thereof may be maintained in a vacuum state, and an inlet window and an outlet window for passing infrared light are coaxially arranged at a side wall; a plasma device connected to the upper surface of the reactor, wherein an internal space unit may be maintained in a vacuum state; a crystal disposed between the reactor and the plasma device, wherein an analyte passes through the surface facing the plasma device; a crystal heating holder fixed to the upper surface of the reactor and controlling the ambient temperature, wherein the crystal is connected to the center thereof; a holder element connected to the crystal heating holder, wherein a groove is formed in a location corresponding to the crystal; a detector detecting the infrared beam outputted from the outlet window ; and an analyzer performing qualitative and quantitative analysis of a sample by using the detected beam intensity, and is characterized by including nano-particles, wherein the crystal is division-disposed on the surface facing the plasma device.