发明名称 PROCESS FOR PLACING AND BONDING CHIPS ON A RECEIVER SUBSTRATE
摘要 This process comprises: placing (70) chips in preset locations by attracting a transfer layer of the chip using a pad, the attractive force between the transfer layer and the pad being a force chosen from the group composed of a magnetic force, an electrostatic force and an electromagnetic force; and bonding (74) the chips thus placed on respective receiving zones of an active side of a receiver substrate, this bonding comprising: preparing (30, 62, 72) bonding sides of the chips and the receiving zones so that they are able to bond without adhesive, then in step c), bringing (78) each bonding side into direct contact with its respective receiving zone and thus bonding the chips to the receiver substrate without adhesive.
申请公布号 WO2015107290(A2) 申请公布日期 2015.07.23
申请号 WO2015FR50052 申请日期 2015.01.09
申请人 COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES 发明人 DEGUET, CHRYSTEL;FOURNEL, FRANK;MORICEAU, HUBERT;SANCHEZ, LOIC
分类号 H01L21/58 主分类号 H01L21/58
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