发明名称 FIBER CONTAINING RESIN SUBSTRATE, SEALED SEMICONDUCTOR ELEMENT MOUNTING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a fiber containing resin substrate capable of presenting a reliable semiconductor device, having high versatility, suppressing deflection of a substrate and peeling of a semiconductor element from the substrate even in a case where a large-diameter substrate is sealed, and collectively sealing a semiconductor element mounting surface, for excellent heat resistance and moisture resistance after sealing.SOLUTION: A fiber containing resin substrate is used for collectively sealing a semiconductor element mounting surface of a substrate on which a semiconductor element is mounted. The fiber containing resin substrate includes a resin impregnating fiber base material which is obtained by impregnating a fiber base material with thermo-curing resin composition and causing the thermo-curing resin composition to be semi-solidified or totally solidified, and a non-curing resin layer formed of thermo-curing resin composition which has not been cured, formed on one surface of the resin impregnating fiber base material in thickness of more than 200 μm and 2000 μm or less. At least one of the thermo-curing resin composition impregnated into the fiber base material and the thermo-curing resin composition forming the non-cured resin layer is the one containing ion trapping agent.
申请公布号 JP2015133526(A) 申请公布日期 2015.07.23
申请号 JP20150090070 申请日期 2015.04.27
申请人 SHIN ETSU CHEM CO LTD 发明人 SHIOBARA TOSHIO;SEKIGUCHI SUSUMU;AKIBA HIDEKI
分类号 H01L23/29;H01L23/31 主分类号 H01L23/29
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