发明名称 AMPLIFICATION DEVICE, VIBRATION ISOLATION DEVICE, LITHOGRAPHY DEVICE, AND MANUFACTURING METHOD OF ARTICLES
摘要 PROBLEM TO BE SOLVED: To provide an amplification device advantageous in suppressing an influence of a temperature variation inside a main body.SOLUTION: An amplification device 17 outputs an output signal according to an input signal through an amplifier 19 and includes a detector 21 that is installed separate from a main body 17a including the amplifier 19, detects the output signal output from the main body 17a, and feeds back to the input signal.
申请公布号 JP2015133445(A) 申请公布日期 2015.07.23
申请号 JP20140005069 申请日期 2014.01.15
申请人 CANON INC 发明人 KATO TAKEO
分类号 H01L21/027;H01L21/68 主分类号 H01L21/027
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