| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus having a high sensitivity even at a peripheral part of an imaging region.SOLUTION: The solid-state imaging apparatus comprises: a semiconductor substrate having an imaging region where a plurality of pixels are arranged in a matrix, and a peripheral circuit region; a light receiving part formed on the semiconductor substrate for each pixel; a wiring layer formed on the semiconductor substrate; a light collection element formed on the wiring layer for each pixel. Further, the light collection element consists of a plurality of ark-like light transmission films using an axis vertical to the semiconductor substrate as a center, and divided by a line width equivalent to or shorter than a wavelength of incoming light. Further, in the light collection element in a pixel located at a peripheral part of the imaging region, a first height of the light transmission film at the center part side of the imaging region is higher than a second height of the light transmission film at an opposite side to the center part of the imaging region.</p> |
