COMPLEX INSPECTION DEVICE FOR PRINTED-SUBSTRATE

摘要

A complex inspection device provided with an optical image pickup unit, an X-ray camera, and an X-ray irradiation unit is provided. An arrival path is defined as a route of an X-ray that arrives at the X-ray camera from the X-ray irradiation unit. The arrival path is shortened for a close-up in a close-up position. In a non-close-up position, the arrival path is longer than that in the close-up position. When the X-ray irradiation unit and/or the X-ray camera needs to move toward the close-up position, the optical pickup unit is moved out in advance so that the X-ray irradiation unit and the X-ray camera relatively move toward the close-up position.

主权项

1. A complex inspection device for a printed substrate, comprising:
a substrate table configured to support a printed substrate on which a plurality of electronic components are mounted; an optical imaging apparatus configured to capture an optical image of an inspection object portion of the printed substrate placed on the substrate table; an X-ray irradiation unit configured to irradiate X-rays onto the inspection object portion; an X-ray camera configured to capture an X-ray image of the inspection object portion from X-rays traveling through the printed substrate; a magnification changing unit configured to change a magnification of the X-ray image by relatively displacing the X-ray irradiation unit and the X-ray camera within a range between a close-up position where an arrival path of X-rays arriving at the X-ray camera from the X-ray irradiation unit has a first distance for close-up imaging, and a non-close-up position where the arrival path has a distance longer than the first distance; a drive unit configured to move the optical imaging apparatus between an imaging position where the optical imaging apparatus faces the inspection object portion at a space between the X-ray irradiation unit and the X-ray camera, and a withdrawn position to which the optical imaging apparatus is moved out from the imaging position so that the X-ray irradiation unit and the X-ray camera are enabled to relatively move toward the close-up position; an imaging position control unit configured to control the drive unit such that, where at least one of the X-ray irradiation unit or the X-ray camera is required to move, the optical imaging apparatus is moved out in advance to the withdrawn position; a table-driving mechanism configured to move the substrate table in a plane parallel to the substrate table, such that the optical imaging apparatus placed in the withdrawn position is allowed to capture an image of the inspection object portion; and a table movement control configured to control the table-driving mechanism so as to capture an image of the inspection object portion at the withdrawn position, where the optical imaging apparatus has moved out to the withdrawn position.