COMPOSITION FOR OPTICAL IMPRINT AND METHOD FOR PRODUCING PATTERN USING THE SAME

摘要

A composition for optical imprint having excellent transferability of a mold shape and giving a pattern having excellent alkali resistance at high temperature by optical imprint and subsequent heating and a method for producing a pattern using the composition. The composition includes a polysiloxane including a structural unit 1 represented by Formula (a1) and a structural unit 2 represented by Formula (a2) and a polymerization initiator. The polysiloxane has a structural unit 1 content of 30% to 85% by mole and a structural unit 2 content of 15% to 70% by mole based on the entire structural units in the polysiloxane. In the formulae, R1 represents a group containing an ethylenic double bond, and R2 represents an aryl group having 6 to 15 carbon atoms which may have a substituent.;

主权项

1. A composition for optical imprint comprising:
a polysiloxane including a structural unit 1 represented by Formula (a1) and a structural unit 2 represented by Formula (a2); and a polymerization initiator, wherein the polysiloxane has a structural unit 1 content of 30% to 85% by mole and a structural unit 2 content of 15% to 70% by mole based on the entire structural units in the polysiloxane, wherein, R1 represents a group containing an ethylenic double bond and R2 represents an aryl group having 6 to 15 carbon atoms which may have a substituent.