DEFORMATION MEASURING APPARATUS USING SHEAROGRAPHY

摘要

The present invention relates to a deformation measuring apparatus using shearography comprising: a support unit to support an object to be measured; a main light source to irradiate light to the object to be measured supported by the support unit; a beam splitter to split the light which is reflected after being irradiated to the object to be measured into a first path and a second path in a direction perpendicular to the first path and to output the light; a basis mirror installed to allow the light to re-enter the beam splitter by reflecting the light coming to the first path from the beam splitter; a variable mirror installed to allow the light to re-enter the beam splitter by reflecting the light coming to the second path from the beam splitter; a tilting unit to tilt the variable mirror with respect to horizontal and vertical directions based on the second path; an imaging unit to image the light re-entering the beam splitter from the basis mirror and the variable mirror and output to a third path; and a processing unit to display an interference fringe through a display unit by receiving the interference fringe imaged by the imaging unit while adjusting the tilting angle of the variable mirror by controlling the tilting unit. The present invention has an effect of increasing defect measurement accuracy by tilting the variable mirror with respect to two shaft directions.