| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultrasonic device being capable of highly accurately measuring a pressure while preventing an influencing thereof on formation of an ultrasonic image as much as possible.SOLUTION: A substrate 58 has a plurality of first opening portions. The plurality of first opening portions is disposed in an array on the substrate 58. Each first ultrasonic transducer element includes two electrodes interposing a piezoelectric material on a first vibration membrane covering each first opening portion for each first opening portion and having a first area. Second opening portions 86 are disposed between a region where the first opening portions are disposed in the array and an outer edge of the substrate 58. Each second opening portion 86 has an opening area greater than the opening area of each first opening portion. Each second ultrasonic transducer element 24 covers each second opening portion 86 and includes two electrodes 54 and 56 interposing a piezoelectric material 55 on a second vibration membrane 45 having a second area greater than the first area.</p> |
