| 发明名称 |
POLISHING PAD, POLISHING APPARATUS AND METHOD FOR MANUFACTURING POLISHING PAD |
| 摘要 |
The present invention relates to a polishing pad comprising a buffer sheet containing a pressure distribution sheet. The invention also relates to a polishing apparatus and a method for manufacturing a polishing pad. |
| 申请公布号 |
US2015202732(A1) |
申请公布日期 |
2015.07.23 |
| 申请号 |
US201514597656 |
申请日期 |
2015.01.15 |
| 申请人 |
San Fang Chemical Industry Co., Ltd. |
发明人 |
FENG CHUNG-CHIH;YAO I-PENG;HUNG YUNG-CHANG;LIU WEI-TE;WANG CHUN-TA |
| 分类号 |
B24B37/22;H01L21/304;B24B37/24 |
主分类号 |
B24B37/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A polishing pad comprising a polishing sheet and a buffer sheet, wherein the buffer sheet comprises:
a main body comprising a plurality of first non-oriented fibers; and a pressure distribution sheet comprising a plurality of first oriented fibers and a plurality of second oriented fibers, wherein all the first oriented fibers are arranged in a first direction; all the second oriented fibers are arranged in a second direction; the first direction intersects with the second direction; and the first oriented fibers and/or the second oriented fibers intersect with at least one of the first non-oriented fibers. |
| 地址 |
Kaohsiung City TW |
