THIN FILM PIEZOELECTRIC ELEMENT, THIN FILM PIEZOELECTRIC ACTUATOR, AND THIN FILM PIEZOELECTRIC SENSOR; AND HARD DISK DRIVE, AND INKJET PRINTER

摘要

An object is to increase the amount of displacement of a thin-film piezoelectric element including a piezoelectric thin film having an uneven-shaped contact surface with the planar shape and the layer structure of the thin-film piezoelectric element kept unchanged. The thin-film piezoelectric element includes a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, in which a surface roughness P-V of an interface between the piezoelectric thin film and at least one of the pair of electrode layers is 220 nm or more and 500 nm or less.

主权项

1. A thin-film piezoelectric element, comprising a pair of electrode layers and a piezoelectric thin film sandwiched between the pair of electrode layers, wherein a surface roughness P-V of an interface between the piezoelectric thin film and at least one of the pair of electrode layers is 220 nm or more and 500 nm or less.