| 发明名称 |
METHOD AND APPARATUS FOR CONDITIONING PROCESS LIQUIDS |
| 摘要 |
An apparatus for conditioning a process liquid comprises a tank incorporating a heat transfer device for heating or cooling a process liquid in the tank. A filtration unit is mounted within the tank for filtering the process liquid in the tank. A pump is mounted adjacent the tank and in fluid communication with process liquid in the tank. The pump causes process liquid to circulate between the filtration unit and the heat transfer device. |
| 申请公布号 |
US2015202555(A1) |
申请公布日期 |
2015.07.23 |
| 申请号 |
US201414158425 |
申请日期 |
2014.01.17 |
| 申请人 |
LAM RESEARCH AG |
发明人 |
KOMETTER Thomas |
| 分类号 |
B01D35/26;H01L21/67;C23F1/08;C23F1/46;B01D35/18;B08B3/14 |
主分类号 |
B01D35/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Apparatus for conditioning a process liquid, comprising:
a tank comprising a heat transfer device for heating or cooling a process liquid in said tank; a filtration unit mounted within said tank for filtering the process liquid in the tank; and a pump mounted adjacent the tank and in fluid communication with process liquid in the tank, the pump causing process liquid to circulate between the filtration unit and the heat transfer device. |
| 地址 |
Villach AT |
