| 摘要 |
PROBLEM TO BE SOLVED: To provide a seal mechanism which enhances sealing performance, a drive unit of the seal mechanism, a transfer device and a manufacturing device.SOLUTION: A seal mechanism partitions two spaces which are different in pressure or gases includes a housing, a shaft inserted into the housing, and a plurality of annular seal members which contact with a part of the shaft, or a radial outside surface of a rotating part which is fixed to the shaft, and seal clearances. The plurality of annular seal members include materials which are different in quality, and arranged in different positions in an axial direction parallel to a center axis of the shaft. |
