Method for Fabricating Crystalline Silicon Solar Cell Having Passivation Layer and Local Rear Contacts

摘要

The present invention is a method for fabricating a crystalline silicon solar cell having a passivation layer and a plurality of local rear contacts, which comprises steps of forming a passivation layer on the rear surface of the silicon substrate; coating distributed metal electrodes on the rear surface and forming a plurality of local rear contacts through firing and forming a metallic reflector at the rear surface so that the metallic reflector electrically contacts with the plurality of local rear contacts.

主权项

1. A method for fabricating a crystalline silicon solar cell having a single passivation layer on its rear side and a plurality of local rear contacts, comprising at least the steps of:
providing a silicon substrate, being one of single crystal silicon and polysilicon, having one of P-type doping and N-type doping, and having a front surface and a rear surface opposed thereto; forming an anti-reflection layer on said front surface of said silicon substrate; forming a single passivation layer on said rear surface of said silicon substrate; forming a plurality of local rear contacts on said rear surface of said silicon substrate; forming, on said front surface, at least a semiconductor layer having a doping opposite to the doping of said silicon substrate and having an electronic bandgap different from that of said silicon substrate; forming electrodes on said front surface of said substrate; and forming a metallic reflector above said rear surface of said silicon substrate, so that said metallic reflector electrically contacts with said plurality of local rear contacts, wherein a portion of said silicon substrate adjacent to said plurality of local rear contacts on said rear surface is a back surface field region.