System for the Combined, Probe-Based Mechanical and Electrical Testing of MEMS

摘要

A system for testing MEMS-structures includes a microforce sensor, two or more multi-axis micropositioning units, at least one electrical probe and a sample holder on which a MEMS-structure is mounted. At least one of the multi-axis micropositioning units is motorized and at least one additional micropositioning unit is equipped with at least one electrical probe to apply electrical signals or to measure electrical signals at one or multiple locations on the MEMS structure. The system with the aforementioned components allows a combined electrical and probe-based mechanical testing of MEMS-structures.

主权项

1. A probe-based system for the combined mechanical and electrical testing of a MEMS structure, the system comprising:
at least one motorized multi-axis micropositioning unit having position encoders generating signals, and at least one additional micropositioning unit; a microforce sensor mounted on said at least one motorized multi-axis micropositioning unit and configured to probe the MEMS structure and generate an output signal; at least one electrical probe mounted on said at least one additional micropositioning unit and configured to apply electrical signals or to measure electrical signals at one or multiple locations on the MEMS structure and to generate signals; at least one microscope being tilted for visualization of a perspective view or a side view of the MEMS structure; a data acquisition unit configured to record the output signal generated by said microforce sensor, the signals generated by said position encoders and the signals generated by said electrical probes; and a sample holder on which the MEMS structure to be tested is mounted.