| 摘要 |
The detecting apparatus comprises: a monochromator, for Bragg-diffracting the incident beam; an analyzer, on which the beam diffracted by the monochromator is incident, an analyzer Bragg-diffracting the incident beam; a controller, for controlling the driver connected to the monochromator and the analyzer, so as to rotate the analyzer or the monochromator in a first direction and in a second direction opposite to the first direction; and a detector, for detecting the beam diffracted by the analyzer or transmitted through the analyzer while the analyzer or the monochromator is rotating and measuring a backlash and/or a slip of the driver by using the detected beam. The backlash detecting apparatus can measure a backlash and/or a slip in the unit of sub-arcsecond or sub-nanometer by using the radiation beam such as a neutron beam, an X-ray beam or the like. |
