| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an airtightness inspection apparatus configured to improve reliability in accuracy of inspecting a thin secondary battery and reliability of an inspection result.SOLUTION: A two-dimensional laser displacement sensor 8 measures multiple point positions on a surface of a battery 1 housed in an airtight container 5 under an atmospheric pressure. The two-dimensional laser displacement sensor 8 measures the multiple point positions on the surface of the battery 1, while reducing the pressure in the airtight container 5 by a decompression device 6. On the basis of ranging data of the multiple point positions obtained by the laser displacement sensor 8, variability of a difference in distance is calculated from the difference in distance before and after decompression. On the basis of a comparison between the variability of the difference in distance and a set value, a controller 9 determines whether airtightness of the battery 1 is proper or not.</p> |
