RADIOGRAPHIC IMAGE DETECTION DEVICE

摘要

In a photoelectric conversion panel, a plurality of TFTs are formed over an insulating substrate. The TFTs are covered by a first planarizing film. A plurality of photodiodes are formed over the first planarizing film. The photodiodes and the first planarizing film are covered by a second planarizing film. A scintillator contains cesium iodide and is directly vapor-deposited over the photoelectric conversion panel. The scintillator is formed in an area, over the second planarizing film, extending to the outside of an area in which the TFTs and the photodiodes are formed and located inside edges of the first and second polarizing films.

主权项

1. A radiographic image detection device comprising:
(A) a photoelectric conversion panel comprising:
an insulating substrate;a plurality of switching elements formed over the insulating substrate;a first planarizing film formed to cover the switching elements and having a planarized surface;a plurality of photodiodes formed over the first planarizing film;a second planarizing film formed to cover the photodiodes and the first planarizing film and having a planarized surface; (B) a scintillator comprising:
cesium iodide vapor-deposited on a vapor deposition area, the vapor deposition area extending over the second planarizing film and located inside a first edge of the first planarizing film and a second edge of the second planarizing film and covering an area in which the switching elements and the photodiodes are formed, the photoelectric conversion film and the scintillator being disposed in this order from a radiation incidence side on which radiation from a radiation source is incident at the time of imaging; and (C) a support plate for supporting the scintillator, the support plate being fixed to a surface, of the scintillator, on which the photoelectric conversion panel is not disposed.